Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
This paper is devoted to the analysis of a finite horizon discrete-time stochastic optimal control problem, in presence of constraints. We study the regularity of the value function which comes from the dynamic programming algorithm. In particular, we derive estimates of the Lipschitz constant of the value function, by means of a regularity result of the multifunction that defines the admissible control set. Copyright © 2006 Watam Press.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
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SPIE Medical Imaging 1994
Charles A Micchelli
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INFORMS 2022