Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The first observation of a metalloid site hyperfine field (hf) distribution in a ferromagnetic amorphous alloy is reported using a spin-echo NMR technique. The 31P nuclei in amorphous Fe75P15C10 show a hf distribution with a maximum at about 27 kOe. The sample was prepared with Fe enriched to 99.93% in 56Fe. A comparison of the NMR spectra on samples containing natural Fe and 56Fe also provides the 57Fe hf distribution whose peak value agrees with Mössbauer results. © 1977.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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Microelectronic Engineering
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Molecular Physics
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Macromolecules