Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
No abstract available.
Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
B. Wagle
EJOR
Raymond F. Boyce, Donald D. Chamberlin, et al.
CACM
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007