Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
A simple interferometric technique is described for monitoring thickness changes in solution‐cast polymer films as they are dried and cured. This paper follows a freshly spun solution of polyamic acid in NMP as it is converted into a cured polyimide film of 6 μm in thickness. The technique is shown to be nearly quantitative despite the effects of thermal expansion and cure‐related refractive index changes. Copyright © 1987 John Wiley & Sons, Inc.
Min Yang, Jeremy Schaub, et al.
Technical Digest-International Electron Devices Meeting
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
E. Burstein
Ferroelectrics