M. Hargrove, S.W. Crowder, et al.
IEDM 1998
A simple interferometric technique is described for monitoring thickness changes in solution‐cast polymer films as they are dried and cured. This paper follows a freshly spun solution of polyamic acid in NMP as it is converted into a cured polyimide film of 6 μm in thickness. The technique is shown to be nearly quantitative despite the effects of thermal expansion and cure‐related refractive index changes. Copyright © 1987 John Wiley & Sons, Inc.
M. Hargrove, S.W. Crowder, et al.
IEDM 1998
Shaoning Yao, Wei-Tsu Tseng, et al.
ADMETA 2011
Sharee J. McNab, Richard J. Blaikie
Materials Research Society Symposium - Proceedings
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering