Sung Ho Kim, Oun-Ho Park, et al.
Small
Present processes for generating metallized patterns for microcircuitry involve many steps including mask fabrication. Maskless metallization of patterns at acceptable resolution would reduce the number of processing steps, add flexibility to the production scheme and facilitate repair of circuitry. Laser enhanced deposition of gold and other metals is believed to represent a significant advance in this field. © 1982 World Gold Council.
Sung Ho Kim, Oun-Ho Park, et al.
Small
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
K.A. Chao
Physical Review B
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009