A. Gangulee, F.M. D'Heurle
Thin Solid Films
Present processes for generating metallized patterns for microcircuitry involve many steps including mask fabrication. Maskless metallization of patterns at acceptable resolution would reduce the number of processing steps, add flexibility to the production scheme and facilitate repair of circuitry. Laser enhanced deposition of gold and other metals is believed to represent a significant advance in this field. © 1982 World Gold Council.
A. Gangulee, F.M. D'Heurle
Thin Solid Films
Ronald Troutman
Synthetic Metals
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
A. Nagarajan, S. Mukherjee, et al.
Journal of Applied Mechanics, Transactions ASME