A. Blacha, R. Clauberg, et al.
IEEE T-ED
Paper
Laser-beam photoemission testing of ultrafast integrated circuits
Abstract
The development of VLSI circuits calls for special design techniques and failure analysis. A laser-beam based contactless photoemission test method was developed for high-sensitivity voltage measurements of very fast signals at interior lines and junctions of such circuits. Features of the method are pointed out.
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