Joseph C. Chon, John I. Thackara, et al.
SPIE Optics, Imaging, and Instrumentation 1994
Laser photoablation of polymeric channel waveguides with embedded contact masks is described. The ablation technique is capable of forming low-optical-loss waveguides with an end-face quality suitable for pigtailed devices at rapid rates. The optical-mode profiles and the optical-loss measurements are reported, and scanning electron microscopy characterization and laser ablation rate measurements are described. The end-face quality processed by laser ablation is sufficiently good for end-fire coupling and thus can permit the elimination of polishing steps. © 1994 Optical Society of America.