Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Reena Elangovan, Shubham Jain, et al.
ACM TODAES
Apostol Natsev, Alexander Haubold, et al.
MMSP 2007
Pradip Bose
VTS 1998