Sandip Tiwari, Paul M. Solomon, et al.
Microelectronic Engineering
No abstract available.
Sandip Tiwari, Paul M. Solomon, et al.
Microelectronic Engineering
Brian A. Bryce, Mark C. Reuter, et al.
Nano Letters
Sufi Zafar, Alessandro Callegari, et al.
IEDM 2002
Alessandro Callegari, Katherina Babich, et al.
SPIE Advanced Lithography 1998