Alessandro Callegari, Katherina Babich, et al.
SPIE Advanced Lithography 1998
No abstract available.
Alessandro Callegari, Katherina Babich, et al.
SPIE Advanced Lithography 1998
Sandip Tiwari, Jerry M. Woodall
Applied Physics Letters
Katherina Babich, Alessandro Callegari, et al.
Microlithography 1998
Gary L. Patton, Subramanian S. Iyer, et al.
IEEE Electron Device Letters