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Proceedings of SPIE - The International Society for Optical Engineering
No abstract available.
Hang-Yip Liu, Steffen Schulze, et al.
Proceedings of SPIE - The International Society for Optical Engineering
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Martin C. Gutzwiller
Physica D: Nonlinear Phenomena