William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Gas-surface interactions including the process of chemisorption, the reaction involving the adsorbate and the adsorbent, the formation of reaction products and the desorption of adsorbed species enhanced by infrared laser radiation have been investigated. Specifically, SF6 and SiF4 interactions with silicon affected by CO2 laser pulses, and the infrared photon stimulated desorption of C5H5N and C5D5N molecules from KCl, Ag(110) and Ag island films have been studied to illustrate the many facets of the vibrationally activated surface processes. Aspects related to surface reaction dynamics and molecular selectivity in photodesorption are discussed. © 1983.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
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Macromolecules
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