Infrared laser induced reaction of SF6 with silicon surfaces

Paper

15 Jul 2008

Infrared laser induced reaction of SF₆ with silicon surfaces

No abstract available.

Conference paper

T.J. Chuang, H. Seki

SPIE Annual Technical Symposium 1982

Paper

T.J. Chuang, R. Schwarzwald, et al.

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Paper

Yoshitaka Mitsuda, Taro Yamada, et al.

Surface Science

Paper

W. Sesselmann, T.J. Chuang

Surface Science