William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
The recovery of the RHEED specular intensity during interrupted MBE is investigated by application of a Monte Carlo simulation of the solid-on-solid model. Procedures are described for characterizing the pathways and quantifying energy barriers to surface recovery in both low- and high-temperature limits in ways that complement and extend existing techniques. © 1989.