John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
We briefly review recent progress in elucidating the time-independent critical behavior of systems with infinite numbers of static absorbing states, and show that the critical exponent describing the decay with time of the order parameter right at the critical point is the same as that of the directed percolation problem.
John A. Hoffnagle, William D. Hinsberg, et al.
Microlithography 2003
Naga Ayachitula, Melissa Buco, et al.
SCC 2007
Da-Ke He, Ashish Jagmohan, et al.
ISIT 2007
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000