Sung Ho Kim, Oun-Ho Park, et al.
Small
A new polymer multilayer fabrication method by the use of thin films of lamellar polystyrene-block-poly(methyl methacrylate was investigated. The thin-film striped patterns of parallel and perpendicular polystyrene-block- poly(methyl methacrylate) (PS-b-PMMA) lamellar to compare the time evolution of ε were prepared. The thin films of cylindrical and lamellar materials were spin casted and annealed for a time range of 5-4000 minutes. The perpendicular orientation of the lamellar domains were surface pretreated with a random copolymer brush prior to diblock copolymer applications. The measurements show that the topological differences between the cylindrical and lamellar morphologies influence coarsening kinetics.
Sung Ho Kim, Oun-Ho Park, et al.
Small
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
John G. Long, Peter C. Searson, et al.
JES
R. Ghez, J.S. Lew
Journal of Crystal Growth