Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Imide-aryl ether oxadiazole copolymers were prepared and their morphology and mechanical properties investigated. A general method for the preparation of aryl ether oxadiazole-containing diamines has been developed in which the generation of the aryl ether linkage was the monomer-forming reaction. The electron-deficient oxazole ring activated a fluoro-substituent towards nucleophilic aromatic substitution. Facile displacement occurred at the para position of a 2-phenyl substituted oxadiazole heterocyclic since the oxadiazole can stabilize the negative charge developed in the transition state through a Meisenheimer complex, analogous to conventional activating groups (i.e. sulphone, ketone, etc.). The synthesis involved the reaction of 2,5-bis(4-fluorophenyl)-1,3,4-oxadiazole with either 3- or 4-aminophenol in an N-methyl-2-pyrrolidone N-cyclohexyl-2-pyrrolidone solvent mixture in the presence of potassium carbonate. These novel diamines were purified by recrystallization, polymerized with various compositions of 4,4′-oxydianiline (ODA) and pyromellitic dianhydride (PMDA) and thermally cured, producing two series of novel imide-aryl ether oxadiazole random copolymers. The resulting copolymers showed mechanical properties comparable to PMDA/ODA polyimide with elongations in the 40% range and moduli in the 2500 MPa range. The copolymers showed Tgs in excess of 300°C. However, the thermal stability was somewhat compromised by the incorporation of the oxadiazole-containing diamine relative to PMDA/ODA polyimide. © 1992.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Ney, R. Rajaram, et al.
Journal of Magnetism and Magnetic Materials
Michiel Sprik
Journal of Physics Condensed Matter
A. Reisman, M. Berkenblit, et al.
JES