Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Uncoated layered alkane (paraffin) objects with a thickness of up to a hundred nanometers have been imaged by scanning tunneling microscopy. This is surprising in view of the generally assumed excellent insulating nature of paraffins. Tilted layers were observed for n-alkanes of various chain lengths. The chemical nature of the imaged objects was demonstrated by the changes of structure observed near the respective melting temperature. © 1989 Springer-Verlag.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
H. Rohrer, H. Thomas
Journal of Applied Physics
Ranulfo Allen, John Baglin, et al.
J. Photopolym. Sci. Tech.
A. Reisman, M. Berkenblit, et al.
JES