Conference paper
SHORT-TIME ANNEALING OF DRY-ETCHING DAMAGE.
C.M. Ransom, T.O. Sedgwick, et al.
ECS Meeting 1983
No abstract available.
C.M. Ransom, T.O. Sedgwick, et al.
ECS Meeting 1983
H. Baratte, T.N. Jackson, et al.
Applied Physics Letters
H. Klauk, T.N. Jackson, et al.
Applied Physics Letters
A.W. Kleinsasser, T.N. Jackson
IEEE/Cornell Conference on Advanced Concepts in High Speed Semiconductor Devices and Circuits 1989