Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
No abstract available.
Xikun Hu, Wenlin Liu, et al.
IEEE J-STARS
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Lawrence Suchow, Norman R. Stemple
JES
Hiroshi Ito, Reinhold Schwalm
JES