Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
The strengthening of the interface between polystyrene (PS) and poly(methyl methacrylate) (PMMA) using a random copolymer P(Sf-r-MMA1-f), where f is the fraction of styrene in the copolymer, was investigated. The maximal fracture toughness, measured by crack propagation, was found when f = 0.68. Neutron reflectivity measurements showed that this value of f corresponded to the point where the interfacial broadening on the PS and PMMA sides of the interface was symmetric. The symmetry of broadening and the optimization of the toughness at f = 0.68 are attributable to a composition-dependent segmental interaction parameter.
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Lawrence Suchow, Norman R. Stemple
JES
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010