Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
Moutaz Fakhry, Yuri Granik, et al.
SPIE Photomask Technology + EUV Lithography 2011
W.C. Tang, H. Rosen, et al.
SPIE Optics, Electro-Optics, and Laser Applications in Science and Engineering 1991
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
Andrew Skumanich
SPIE Optics Quebec 1993