William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
The conductivity of n channel MOSFET devices has been measured in the temperature range 4.2K<or=T<or=77K in samples with varying densities of interface charge. Contrary to previous results in this temperature range, the conductivity obeys the law lg sigma varies as T-1/3 indicative of a variable range hopping mechanism. The minimum metallic conductivity is found to vary linearly with the average separation of the oxide charge, contrary to prediction.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
David B. Mitzi
Journal of Materials Chemistry