Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In order to increase the electronic localization in the LaCuO3-type oxide, the solid solution La1-xYCuO3 (x 0.20) has been prepared through a new process. Magnetical and electrical properties are correlated with the structural transformation induced by the substitution. © 1991, Taylor & Francis Group, LLC. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Michiel Sprik
Journal of Physics Condensed Matter
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
E. Babich, J. Paraszczak, et al.
Microelectronic Engineering