G. Ramalingam
Theoretical Computer Science
This paper is an overview of the designs of high-numerical-aperture lenses for optical projection lithography at the IBM Thomas J. Watson Research Center.
G. Ramalingam
Theoretical Computer Science
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
David A. Selby
IBM J. Res. Dev
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989