E. Liniger, L. Gignac, et al.
Journal of Applied Physics
Paper
High energy BSE/SE/STEM imaging of 8 um thick semiconductor interconnects
Abstract
No abstract available.
Related
J.M.E. Harper, C. Cabral Jr., et al.
MRS Spring Meeting 1999
Conference paper
Electromigration reliability of advanced interconnects
C.-K. Hu, L. Gignac, et al.
International Workshop on Stress-Induced Phenomena in Metallization 2007
C.-K. Hu, D. Canaperi, et al.
AMC 2003