High energy BSE/SE/STEM imaging of 8 um thick semiconductor interconnects

Paper

27 Aug 2014

Abstract

No abstract available.

Conference paper

K.P. Rodbell, V. Svilan, et al.

MRS Spring Meeting 1996

Conference paper

C.-K. Hu, L. Gignac, et al.

IITC 2002

Conference paper

L. Gignac, K.P. Rodbell, et al.

MRS Spring Meeting 1999

Conference paper

K.W. Guarini, C.T. Black, et al.

IEDM 2003