C.-K. Hu, L. Gignac, et al.
Applied Physics Letters
Paper
High energy BSE/SE/STEM imaging of 8 um thick semiconductor interconnects
Abstract
No abstract available.
Related
L. Gignac, S.H. Boettcher, et al.
M&M 2006
S. Bangsaruntip, G.M. Cohen, et al.
IEDM 2009
C.-K. Hu, D. Canaperi, et al.
IRPS 2004