Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
: A helical smectic A* phase between the isotropic liquid and the ferroelectric smectic C* phase is found in three new series with very long alkoxy chains. The materials belong to the optically active series : (R) and (S) 1-methylheptyl 4’-(4“-alkoxybenzoyloxy)tolan-4-carboxylates, 4’-(4“-alkoxy-3”-fluorobenzoyloxy)tolan-4-carboxylates, 4’-(4“-alkoxy-2”, 3“-difluorobenzoyloxy)tolan-4-carboxylates. This new phase has two typical textures: filament texture when the helix pitch is large and cholesteric texture (Grandjean texture) with a short pitch. © 1991, Taylor & Francis Group, LLC. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
J.C. Marinace
JES
John G. Long, Peter C. Searson, et al.
JES
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983