Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
No abstract available.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Marshall W. Bern, Howard J. Karloff, et al.
Theoretical Computer Science
Xiaozhu Kang, Hui Zhang, et al.
ICWS 2008
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007