Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Singly-positioned epitaxial films of the organic conductor (TTF) (TCNQ) were grown by sublimation on cleaved (100) NaCl substrates subjected to compressive stress along a 〈110〉 direction, and on polar (010) faces of ferroelectric triglycine sulfate. The conditions for obtaining thin films of this material, as well as the limitations of the epitaxial technique for obtaining large area thick films are presented and discussed. © 1976.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Peter J. Price
Surface Science