A. Krol, C.J. Sher, et al.
Surface Science
From a molecular dynamics experiment of an unstable two-dimensional fluid undergoing phase separation, we observe two principal growth regimes; (1) spinodal decomposition with a wavelike morphology followed by (2) a transition to cluster formation and growth due to atomic condensation and cluster coagulation. In the second regime the growth law is t 1 2. This dependence arises from the isothermal growth law for vapor accretion on two-dimensional clusters in a 'onerd component supersaturated vapor. The details of theoretical analysi that leads to t 1 2 growth law are presented. © 1983.
A. Krol, C.J. Sher, et al.
Surface Science
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990
J.H. Stathis, R. Bolam, et al.
INFOS 2005
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007