Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Assume F = {f1,.∈.∈.,fn} is a family of nonnegative functions of n-1 nonnegative variables such that, for every matrix A of order n, |a ii|>f i (moduli of off-diagonal entries in row i of A) for all i implies A nonsingular. We show that there is a positive vector x, depending only on F, such that for all A=(a ij), and all i, f i ≥ ∑j|a ij|x j/xi. This improves a theorem of Ky Fan, and yields a generalization of a nonsingularity criterion of Gudkov. © Springer 2006.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
Martin C. Gutzwiller
Physica D: Nonlinear Phenomena
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
R.A. Brualdi, A.J. Hoffman
Linear Algebra and Its Applications