Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Wireframe modelling has been discredited as a primary shape representation technique, but is still useful as a fast way to display simple objects, in particular when selecting projections. Computing wireframes from set-theoretic solid models is potentially very time-consuming. Recursive division of the object space may easily be used to accelerate this process, but the resulting wireframes are unnecessarily segmented. By searching for the vertices of a model and deriving submodels, which are then used to find edges between vertices, a program has been written that both exhibits the good complexity performance of recursive division and produces wireframes containing maximal length wires. © 1986.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Sai Zeng, Angran Xiao, et al.
CAD Computer Aided Design
Fan Jing Meng, Ying Huang, et al.
ICEBE 2007
David A. Selby
IBM J. Res. Dev