Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
In a universe of machines with n labeled states and p labeled inputs, it is shown that almost all machines have series-parallel decomposition if n and p approach infinity in such a way that pn1/2e-n→0. Also, almost all machines have no series-parallel decomposition if n and p approach infinity in such a way that pn1/6e-n→∞. © 1968 Academic Press Inc.
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
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