J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
No abstract available.
J.P. Locquet, J. Perret, et al.
SPIE Optical Science, Engineering, and Instrumentation 1998
Renu Tewari, Richard P. King, et al.
IS&T/SPIE Electronic Imaging 1996
Michael D. Moffitt
ICCAD 2009
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007