Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The continuum generalization of the p-state Potts model is analyzed in the ordered phase. Renormalization-group iterations in d=4- dimensions are followed by an elimination of the transverse modes and a mapping onto an effective Ising model. This model is then used to show that the transition is first order for p>pc(d) and continuous for p<pc(d). We find that pc(d)=2 for d>4 and pc(4-)=2+O(2). © 1981 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
Fernando Marianno, Wang Zhou, et al.
INFORMS 2021
A. Gupta, R. Gross, et al.
SPIE Advances in Semiconductors and Superconductors 1990