Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A system of two-dimensional thermal equations of motion for anisotropic thin plates is obtained from the non-linear three-dimensional oscillation theory of finite elasticity, by using the method based on expansion of the displacement functions in terms of thickness coordinates and the variational method of Kirchhoff. Non-linearity, based on geometric considerations is expressed by taking into account the angles of rotation in the definition of strain tensor, while physical linearity is expressed by using Duhamel's law of anisotropic thermoelasticity generalized to large deformations. © 1966.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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SCC 2007
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INFORMS 2022