K. Pennington
IEEE JQE
Defect enhancement in semiconductor wafers is shown to be possible by spatial frequency filtering-without the necessity for filter alignment. The technique depends on the wafer being sufficiently periodic. Coherent optical and digital computer simulation results are presented. © 1971 Optical Society of America.
K. Pennington
IEEE JQE
G. Fan, K. Pennington, et al.
Journal of Applied Physics
K. Pennington, P.M. Will, et al.
Optics Communications
K. Pennington, L. Kuhn
Optics Communications