Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The electric-field-dependent conductivity was studied on Ge1-xAux alloys near the metal-insulator transition. We have been able to rule out trivial heating effects, and our experiments are described in terms of electron heating. Our findings are in good agreement with theories which discuss electron-phonon relaxation time effects. © 1987 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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