Fabrication of ultrasensitive piezoresistive cantilevers for torque magnetometry

J. Brugger; M. Willemin; C. Rossel; G. Beljakovic; P. Vettiger

TRANSDUCERS 1997

Conference paper

16 Jun 1997

Fabrication of ultrasensitive piezoresistive cantilevers for torque magnetometry

Abstract

We describe the fabrication and first characterization of piezoresistive cantilevers developed for ultra-sensitive torque magnetometry. The levers have been designed to optimize the sensing in both flexion and torsion modes.

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Abstract

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