Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The fabrication of multilayered nanoporous poly(methyl silsesquioxane) (PMSSQ) was studied. The morphology and dimensions of the pores were determined by the interaction between the porogen and the inorganic polymers. It was found that the nanoporous PMSSQ films were optically homogeneous because the pores were much smaller than the wavelength of the visible light.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A. Gangulee, F.M. D'Heurle
Thin Solid Films
R.D. Murphy, R.O. Watts
Journal of Low Temperature Physics
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP