Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
We show that the semilattice extension problem raised by Arbib and Manes in [2] is NP-hard, implying that no simple solution is likely to be forthcoming. © 1983 Birkhäuser Verlag.
J. LaRue, C. Ting
Proceedings of SPIE 1989
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