Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Grant (1973) showed that the expansion giving the profile of a steady Stokes wave near a 120° corner was more complicated than had previously been assumed. This paper gives further terms in such an expansion, and shows that generating them cannot introduce transcendental quantities beyond those noted by Grant. © 1974, Cambridge University Press. All rights reserved.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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