Conference paper
Characterization of a next generation step-and-scan system
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
No abstract available.
Timothy J. Wiltshire, Joseph P. Kirk, et al.
SPIE Advanced Lithography 1998
James Lee Hafner
Journal of Number Theory
A.R. Conn, Nick Gould, et al.
Mathematics of Computation
Ligang Lu, Jack L. Kouloheris
IS&T/SPIE Electronic Imaging 2002