S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
S. Cohen, T.O. Sedgwick, et al.
MRS Proceedings 1983
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
A. Krol, C.J. Sher, et al.
Surface Science