Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Recent theories of Singwi et al. for the dielectric response beyond the random-phase approximation are examined in the density-functional formalism. Their approximation and another from the perturbation expansion in the electron-electron interaction are used to calculate the correction to the local-density approximation of the exchange energy in atoms. The latter gives better results. © 1973 The American Physical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
R.M. Macfarlane, R.L. Cone
Physical Review B - CMMP
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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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ADMETA 2011