Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
In any many-body variational approach to electron-atom scattering theory certain types of matrix elements not encountered in bound state problems must be evaluated. In this paper the new integrals which occur are identified and procedures for obtaining all but the exchange type integrals in all reasonable cases are presented. The techniques discussed are oriented toward rapid and accurate evaluation on a computer. A number of previously unpublished formulas and properties of integrals involving spherical Bessel functions are presented. © 1969.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Zhihua Xiong, Yixin Xu, et al.
International Journal of Modelling, Identification and Control
Corneliu Constantinescu
SPIE Optical Engineering + Applications 2009
Shu Tezuka
WSC 1991