Equilibrium crystal shape of silicon near (001)

We calculate the equilibrium shape of a silicon crystal at orientations near (001), both at T=0 and at elevated temperature. Comparison with recent experiments shows that several topographic features observed on Si directly reflect the equilibrium shape. In particular, our results resolve an apparent discrepancy between theory and experiment, regarding faceting between regions of single-layer and double-layer steps. © 1993 The American Physical Society.