L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
No abstract available.
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
Oliver Schilter, Alain Vaucher, et al.
Digital Discovery
J.Z. Sun
Journal of Applied Physics
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008