Paul J. Steinhardt, P. Chaudhari
Journal of Computational Physics
Paul J. Steinhardt, P. Chaudhari
Journal of Computational Physics
Ehud Altman, Kenneth R. Brown, et al.
PRX Quantum
Jaione Tirapu Azpiroz, Alan E. Rosenbluth, et al.
SPIE Photomask Technology + EUV Lithography 2009
Donald Samuels, Ian Stobert
SPIE Photomask Technology + EUV Lithography 2007