J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
No abstract available.
J. Paraszczak, J.M. Shaw, et al.
Micro and Nano Engineering
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
I. Morgenstern, K.A. Müller, et al.
Physica B: Physics of Condensed Matter
Robert W. Keyes
Physical Review B