Alwin E. Michel, R.H. Kastl, et al.
Applied Physics Letters
No abstract available.
Alwin E. Michel, R.H. Kastl, et al.
Applied Physics Letters
J.D. Mis, S. Mader, et al.
Journal of Applied Physics
J.N. Burghartz, B.J. Ginsberg, et al.
VLSI Technology 1989
W.K. Chu, S. Mader, et al.
Nuclear Instruments and Methods